{"identifier":"nobleid:/d1/20260526/D5ABC438","arkIdentifier":"ark:/48914/d1/20260526/D5ABC438","version":1,"workTitle":"Aufbau und Betrieb eines Infrarot-Mikrospektrometers auf der Basis eines MEMS-FP-Filters","workType":"Dataset","authors":"Martin Ebermann; Norbert Neumann","description":"Published: 2016-01-01 | Source: nano Online","workUrl":"https://doi.org/10.1515/nano.0046.00010","existingDoi":"https://doi.org/10.1515/nano.0046.00010","createdAt":"2026-05-28T00:14:12.699623Z","canonicalUrl":"https://nobleid.org/ark:/48914/d1/20260526/D5ABC438.v1"}