{"identifier":"nobleid:/w1/20260515/D2BC9DA5","arkIdentifier":"ark:/48914/w1/20260515/D2BC9DA5","version":1,"workTitle":"UV/ozone cleaning of surfaces","workType":"Journal Article","authors":"J.R. Vig","description":null,"workUrl":null,"existingDoi":"10.1116/1.573115","createdAt":"2026-05-15T15:45:55.764544Z","canonicalUrl":"https://nobleid.org/ark:/48914/w1/20260515/D2BC9DA5.v1"}