{"identifier":"nobleid:/w1/20260521/00FD36EB","arkIdentifier":"ark:/48914/w1/20260521/00FD36EB","version":1,"workTitle":"The Micro-Motion and Micro-Positioning Mechanism Design of Micromechanical Information Devices","workType":"Journal Article","authors":"Tetsuya Suzuki, Kiyoshi Itao","description":null,"workUrl":null,"existingDoi":"10.1142/9789812815910_0018","createdAt":"2026-05-21T13:56:18.555924Z","canonicalUrl":"https://nobleid.org/ark:/48914/w1/20260521/00FD36EB.v1"}