{"identifier":"nobleid:/w1/20260521/393D5457","arkIdentifier":"ark:/48914/w1/20260521/393D5457","version":1,"workTitle":"Apparatus for providing electrical and fluid communication to a rotating microelectronic workpiece during electrochemical processing","workType":"Journal Article","authors":"Unknown","description":null,"workUrl":null,"existingDoi":"10.1016/s0026-0576(04)84749-4","createdAt":"2026-05-21T12:13:48.373174Z","canonicalUrl":"https://nobleid.org/ark:/48914/w1/20260521/393D5457.v1"}