{"identifier":"nobleid:/w1/20260521/3CECDFB2","arkIdentifier":"ark:/48914/w1/20260521/3CECDFB2","version":1,"workTitle":"Thermal Oxidation of Tungsten‐Based Sputtered Coatings","workType":"Journal Article","authors":"C. Louro, A. Cavaleiro","description":null,"workUrl":null,"existingDoi":"10.1149/1.1837394","createdAt":"2026-05-21T14:53:40.243892Z","canonicalUrl":"https://nobleid.org/ark:/48914/w1/20260521/3CECDFB2.v1"}