{"identifier":"nobleid:/w1/20260521/74ABEBBC","arkIdentifier":"ark:/48914/w1/20260521/74ABEBBC","version":1,"workTitle":"Experimental observation of standing wave effect in low-pressure very-high-frequency capacitive discharges","workType":"Journal Article","authors":"Yong-Xin Liu, Fei Gao, Jia Liu, You‐Nian Wang","description":null,"workUrl":null,"existingDoi":"10.1063/1.4891504","createdAt":"2026-05-21T21:12:36.980435Z","canonicalUrl":"https://nobleid.org/ark:/48914/w1/20260521/74ABEBBC.v1"}