{"identifier":"nobleid:/w1/20260521/AADEEC03","arkIdentifier":"ark:/48914/w1/20260521/AADEEC03","version":1,"workTitle":"Measuring Step Heights Using An Optical Profiler","workType":"Conference Paper","authors":"Katherine Creath","description":null,"workUrl":null,"existingDoi":"10.1117/12.938629","createdAt":"2026-05-21T11:46:55.367692Z","canonicalUrl":"https://nobleid.org/ark:/48914/w1/20260521/AADEEC03.v1"}