{"identifier":"nobleid:/w1/20260521/AF99D303","arkIdentifier":"ark:/48914/w1/20260521/AF99D303","version":1,"workTitle":"Experimental analyses of the mechanical reliability of advanced BEOL/fBEOL stacks regarding CPI loading","workType":"Journal Article","authors":"H. Geisler, E. Schuchardt, Martin Brueckner, Petra Hofmann, Kashi Vishwanath Machani, Frank Kuechenmeister, D. Breuer, H.J. Engelmann","description":null,"workUrl":null,"existingDoi":"10.1109/irps.2013.6532030","createdAt":"2026-05-21T16:15:13.001110Z","canonicalUrl":"https://nobleid.org/ark:/48914/w1/20260521/AF99D303.v1"}