{"identifier":"nobleid:/w1/20260521/BBC95BA0","arkIdentifier":"ark:/48914/w1/20260521/BBC95BA0","version":1,"workTitle":"X-ray study of silicon crystal structure changes due to implantation with fast nitrogen ions","workType":"Journal Article","authors":"D. Żymierska, J. Auleytner, K. Godwod, J. Z. Domagała, L. I. Datsenko, J. Choiński","description":null,"workUrl":null,"existingDoi":"10.1016/s0925-8388(01)01300-7","createdAt":"2026-05-21T13:36:01.554720Z","canonicalUrl":"https://nobleid.org/ark:/48914/w1/20260521/BBC95BA0.v1"}