{"identifier":"nobleid:/w1/20260521/CD2AB9AF","arkIdentifier":"ark:/48914/w1/20260521/CD2AB9AF","version":1,"workTitle":"Optical design and performance of F-Theta lenses for high-power and high-precision applications","workType":"Conference Paper","authors":"V. I. Yurevich, V. A. Grimm, A. A. Afonyushkin, K. V. Yudin, S. G. Gorny","description":null,"workUrl":null,"existingDoi":"10.1117/12.2190777","createdAt":"2026-05-21T22:59:53.391593Z","canonicalUrl":"https://nobleid.org/ark:/48914/w1/20260521/CD2AB9AF.v1"}