{"identifier":"nobleid:/w1/20260521/F4792F61","arkIdentifier":"ark:/48914/w1/20260521/F4792F61","version":1,"workTitle":"Defect Engineering in Polycrystalline Silicon Using Ultrasound","workType":"Journal Article","authors":"S. Ostapenko","description":null,"workUrl":null,"existingDoi":"10.4028/www.scientific.net/ssp.67-68.485","createdAt":"2026-05-21T18:34:21.346225Z","canonicalUrl":"https://nobleid.org/ark:/48914/w1/20260521/F4792F61.v1"}