{"identifier":"nobleid:/w1/20260521/F4937726","arkIdentifier":"ark:/48914/w1/20260521/F4937726","version":1,"workTitle":"Classification for Filterability Index of Reagent-Grade Water and High-Purity Waters for Microelectronic Device Processing","workType":"Journal Article","authors":"Committee","description":null,"workUrl":null,"existingDoi":"10.1520/f0569","createdAt":"2026-05-21T16:25:21.746814Z","canonicalUrl":"https://nobleid.org/ark:/48914/w1/20260521/F4937726.v1"}