{"identifier":"nobleid:/w1/20260521/F643DFEB","arkIdentifier":"ark:/48914/w1/20260521/F643DFEB","version":1,"workTitle":"Dual damascene patterning of polymer interlayer dielectrics","workType":"Journal Article","authors":"M. Hussein, R. Brain, R. Turkot, Jihperng Leu, Vivek K. Singh, S. Sivakumar","description":null,"workUrl":null,"existingDoi":"10.1109/iitc.2003.1219704","createdAt":"2026-05-21T20:23:48.748473Z","canonicalUrl":"https://nobleid.org/ark:/48914/w1/20260521/F643DFEB.v1"}