{"identifier":"nobleid:/w1/20260521/F698CE01","arkIdentifier":"ark:/48914/w1/20260521/F698CE01","version":1,"workTitle":"4024. Calculation of current—voltage characteristics and of deposition rate by diode-sputtering technology. (Germany)","workType":"Journal Article","authors":"Unknown","description":null,"workUrl":null,"existingDoi":"10.1016/s0042-207x(79)80676-4","createdAt":"2026-05-21T20:40:34.940372Z","canonicalUrl":"https://nobleid.org/ark:/48914/w1/20260521/F698CE01.v1"}