{"identifier":"nobleid:/w1/20260521/FD0ACCE7","arkIdentifier":"ark:/48914/w1/20260521/FD0ACCE7","version":1,"workTitle":"Focused helium ion beam milling and deposition","workType":"Journal Article","authors":"Stuart A. Boden, Z. Moktadir, Darren M. Bagnall, Hiroshi Mizuta, H.N. Rutt","description":null,"workUrl":null,"existingDoi":"10.1016/j.mee.2010.11.041","createdAt":"2026-05-21T21:08:28.936048Z","canonicalUrl":"https://nobleid.org/ark:/48914/w1/20260521/FD0ACCE7.v1"}