{"identifier":"nobleid:/w1/20260521/FD94FD53","arkIdentifier":"ark:/48914/w1/20260521/FD94FD53","version":1,"workTitle":"Kinetics of Initial Layer-by-Layer Oxidation of Si(001) Surfaces","workType":"Journal Article","authors":"Heiji Watanabe, Koichi Kato, Tsuyoshi Uda, Ken Fujita, Masakazu Ichikawa, T. Kawamura, Kiyoyuki Terakura","description":null,"workUrl":null,"existingDoi":"10.1103/physrevlett.80.345","createdAt":"2026-05-21T12:48:23.280335Z","canonicalUrl":"https://nobleid.org/ark:/48914/w1/20260521/FD94FD53.v1"}