{"identifier":"nobleid:/w1/20260522/7C5ABC30","arkIdentifier":"ark:/48914/w1/20260522/7C5ABC30","version":1,"workTitle":"Innovative application of the RCWA method for the ultra-sensitive transmittance-based CD measurements on phase-shift masks","workType":"Conference Paper","authors":"A. X. Gray, John Lam, Stanley Chen","description":null,"workUrl":null,"existingDoi":"10.1117/12.736963","createdAt":"2026-05-22T00:21:50.943609Z","canonicalUrl":"https://nobleid.org/ark:/48914/w1/20260522/7C5ABC30.v1"}