{"identifier":"nobleid:/w1/20260526/66AAE09B","arkIdentifier":"ark:/48914/w1/20260526/66AAE09B","version":1,"workTitle":"Principles of Plasma Discharges and Materials Processing","workType":"Journal Article","authors":"Michael A. Lieberman, Allan J. Lichtenberg","description":null,"workUrl":null,"createdAt":"2026-05-26T04:19:30.539545Z","canonicalUrl":"https://nobleid.org/ark:/48914/w1/20260526/66AAE09B.v1"}