{"identifier":"nobleid:/w1/20260526/DF3FADEF","arkIdentifier":"ark:/48914/w1/20260526/DF3FADEF","version":1,"workTitle":"Method of forming film, electro-optic device and electronic equipment","workType":"Journal Article","authors":"MIURA HIROTSUNA","description":null,"workUrl":null,"existingDoi":null,"createdAt":"2026-05-26T04:44:49.445226Z","canonicalUrl":"https://nobleid.org/ark:/48914/w1/20260526/DF3FADEF.v1"}