Electrical calibration of spring-mass MEMS capacitive accelerometers

L.E. Deng; Vinay Kundur; Naveen Sai Jangala Naga; Muhlis Kenan Ozel; Ender Yılmaz; Sule Ozev; Bertan Bakkaloğlu; Sayfe Kiaei; Divya Pratab; Tehmoor Dar

doi:10.5555/2485288.2485428

Electrical calibration of spring-mass MEMS capacitive accelerometers

Identifier:nobleid.org/w1/20260515/7EF1D65A

Type:Journal Article

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Vinay Kundur

Naveen Sai Jangala Naga

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Electrical calibration of spring-mass MEMS capacitive accelerometers

Identifier:nobleid.org/w1/20260515/7EF1D65A

Type:Journal Article

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L.E. Deng

Vinay Kundur

Naveen Sai Jangala Naga

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