A holistic methodology to drive process window entitlement and its application to 20nm logic

Lalit Shokeen; Ayman Hamouda; Mark A. Terry; Dan J. Dechene; Stephen Hsu; Michael Crouse; Pengcheng Li; Keith Gronlund; Gary Zhang

doi:10.1117/12.2086101

A holistic methodology to drive process window entitlement and its application to 20nm logic

Identifier:nobleid.org/w1/20260515/8233DF76

Type:Conference Paper

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A holistic methodology to drive process window entitlement and its application to 20nm logic

Identifier:nobleid.org/w1/20260515/8233DF76

Type:Conference Paper

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