Monolithic Resonant-Cantilever-Based CMOS Microsystem for Biochemical Sensing | NobleID

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Monolithic Resonant-Cantilever-Based CMOS Microsystem for Biochemical Sensing

Identifier:nobleid.org/w1/20260515/9DAD0366

Type:Journal Article

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K.‐U. Kirstein

Jan Lichtenberg

Andreas Hierlemann

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