Adhesion of Ti thin film to sputter etched AlN substrate | NobleID

Main

Mint Work Search Explore Works Knowledge Graph Citation Graph Bibliometrics Receipts

v1

Adhesion of Ti thin film to sputter etched AlN substrate

Identifier:nobleid.org/w1/20260515/D7B8FACD

Type:Preprint

0 views

Support unavailableClaim Your Authorship

View Original Paper Source

Embeddable Badge

[![NobleID](https://www.nobleid.org/api/badge/D7B8FACD.svg?ark=w1%2F20260515%2FD7B8FACD)](https://nobleid.org/work/w1/20260515/D7B8FACD)

ARK Inflections

Metadata Policy

Metadata Formats

Bibliometric Analysis

Impact metrics, research fronts, co-authorship networks →

Authors & Claims

Paper Authors

Takashi Tooyama

Yuichiro Kuroki

Tomoichiro Okamoto

Masasuke Takata

Yasuyuki Yamamoto

Motonobu Teramoto

Hitofumi Taniguchi

Claim authorship of this work

info@nobleid.org

About FAQ Terms Policy Persistence & Resolver Service Policy