Effect of ion energy and dose on the positioning of 2D-arrays of Si nanocrystals ion beam synthesised in thin SiO2 layers

M. Carrada; N. Cherkashin; Caroline Bonafos; G. Benassayag; Delphine Chassaing; P. Normand; D. Tsoukalas; V. Soncini; A. Claverie

doi:10.1016/s0921-5107(02)00724-9

Effect of ion energy and dose on the positioning of 2D-arrays of Si nanocrystals ion beam synthesised in thin SiO2 layers

Identifier:nobleid.org/w1/20260515/FD50F977

Type:Journal Article

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Effect of ion energy and dose on the positioning of 2D-arrays of Si nanocrystals ion beam synthesised in thin SiO2 layers

Identifier:nobleid.org/w1/20260515/FD50F977

Type:Journal Article

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