Implementation of templated DSA for via layer patterning at the 7nm node

Roel Gronheid; Jan Doise; Joost Bekaert; Boon Teik Chan; Ioannis Karageorgos; Julien Ryckaert; Geert Vandenberghe; Yi Cao; Guanyang Lin; Mark Somervell

doi:10.1117/12.2086090

Implementation of templated DSA for via layer patterning at the 7nm node

Identifier:nobleid.org/w1/20260525/A3C47DF4

Type:Conference Paper

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Implementation of templated DSA for via layer patterning at the 7nm node

Identifier:nobleid.org/w1/20260525/A3C47DF4

Type:Conference Paper

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